Volume 37, Issue 1 No AccessMicrofabricated Shear Stress Sensors, Part 1: Design and FabricationTao Pan, Daniel Hyman, Mehran Mehregany, Eli Reshotko and Steven GarverickTao Pan Case Western Reserve University, Cleveland, Ohio 44106Search for more papers by this author, Daniel Hyman Case Western Reserve University, Cleveland, Ohio 44106Search for more papers by this author, Mehran Mehregany Case Western Reserve University, Cleveland, Ohio 44106Search for more papers by this author, Eli Reshotko Case Western Reserve University, Cleveland, Ohio 44106Search for more papers by this author and Steven Garverick Case Western Reserve University, Cleveland, Ohio 44106Search for more papers by this authorPublished Online:17 May 2012https://doi.org/10.2514/2.665SectionsRead Now ToolsAdd to favoritesDownload citationTrack citations ShareShare onFacebookXLinked InRedditEmail About Previous article Next article FiguresReferencesRelatedDetailsSee PDF for referencesCited byAnnealing Effect on Temperature Coefficient of Resistance of Microflexible Thermal Shear Stress Sensor1 Nov 2020 | IEEE Sensors Letters, Vol. 4, No. 11A Shear-Stress Sensor for Hypersonic Flow Measurement1 Aug 2019 | Journal of Microelectromechanical Systems, Vol. 28, No. 4Temperature Drifts of The Floating Element Wall Shear Stress Sensor with Capacitive Sensing1 Jun 2019Accurate Measurements of Wall Shear Stress on a Plate with Elliptic Leading Edge15 August 2018 | Sensors, Vol. 18, No. 8Multiphysics model investigating performance of a micromachined floating element shear stress sensor1 Jan 2018 | Sensors and Actuators A: Physical, Vol. 269Smooth-surfaced flexible wall shear stress sensor fabricated by film transfer technology1 Oct 2017 | Sensors and Actuators A: Physical, Vol. 265Development of the floating element wall shear stress sensor with an analytical model1 Oct 2017Characterization of a sapphire optical wall shear stress sensor for high-temperature applicationsDavid A. 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White10 January 2014A microfabricated shear sensor array on a chip with pressure gradient calibration1 Jan 2014 | Sensors and Actuators A: Physical, Vol. 205Proposal of shear stress sensor based on optical detection1 Nov 2013Parametric amplification in a micro Coriolis mass flow sensor: Reduction of power dissipation without loss of sensitivity1 Nov 2013Design of a micro floating element shear stress sensor1 Apr 2013 | Flow Measurement and Instrumentation, Vol. 30Calibration of a thermal MEMS shear stress sensor array1 Nov 2012Experimental Verification of a MEMS Based Skin Friction Sensor for Quantitative Wall Shear Stress MeasurementJessica Meloy, John Griffin, Louis Cattafesta, Jeremy Sells , Mark Sheplak and Vijay Chandrasekharan14 June 2012A Microscale Differential Capacitive Direct Wall-Shear-Stress Sensor1 Jun 2011 | Journal of Microelectromechanical Systems, Vol. 20, No. 3Invited Article: Local shear stress transduction24 February 2010 | Review of Scientific Instruments, Vol. 81, No. 2Characterization of a MEMS-Based Floating Element Shear Stress SensorVijay Chandrasekharan, Jeremy Sells, David Arnold and Mark Sheplak15 June 2012Microelectromechanical Systems–Based Feedback Control of Turbulence for Skin Friction Reduction1 Jan 2009 | Annual Review of Fluid Mechanics, Vol. 41, No. 1Working Principle Simulations of a Dynamic ResonantWall Shear Stress Sensor Concept17 April 2008 | Sensors, Vol. 8, No. 4A MEMS Shear Stress Sensor for Turbulence MeasurementsYawei Li, Vijay Chandrasekharan, B Bertolucci, Toshikazu Nishida, Louis Cattafesta and Mark Sheplak19 June 2012Flow Sensors1 Jan 2008Dynamic calibration technique for thermal shear-stress sensors with mean flow11 May 2005 | Experiments in Fluids, Vol. 39, No. 1A parametrized three-dimensional model for MEMS thermal shear-stress sensors1 Jun 2005 | Journal of Microelectromechanical Systems, Vol. 14, No. 3A microfabricated wall shear-stress sensor with capacitative sensing1 Feb 2005 | Journal of Microelectromechanical Systems, Vol. 14, No. 1Experiments and simulations of MEMS thermal sensors for wall shear-stress measurements in aerodynamic control applications27 August 2004 | Journal of Micromechanics and Microengineering, Vol. 14, No. 12Optical Flow Sensor Using Geometric Moiré Interferometry19 July 2004Numerical Model of a Dynamic Resonant Wall Shear Stress SensorXu Zhang, William Armstrong, William Lindberg and Jonathan Naughton19 June 2012MEMS Shear Stress Sensors: Promise and ProgressMark Sheplak, Louis Cattafesta, Toshikazu Nishida and Catherine McGinley19 June 2012A Dynamic Resonant Wall Shear Stress SensorWilliam Armstrong, Jonathan Naughton and A. Singhal19 June 2012Microfabricated Shear-Stress Sensors, Part 3: Reducing Calibration Uncertainty Mehul P. Patel , Eli Reshotko and Daniel Hyman 17 May 2012 | AIAA Journal, Vol. 40, No. 8Modern developments in shear-stress measurement1 Aug 2002 | Progress in Aerospace Sciences, Vol. 38, No. 6-7Characterization of a Silicon-Micromachined Thermal Shear-Stress Sensor Mark Sheplak , Venkataraman Chandrasekaran , Anthony Cain , Toshikazu Nishida and Louis N. Cattafesta III 17 May 2012 | AIAA Journal, Vol. 40, No. 6A MEMS device for measurement of skin friction with capacitive sensing1 Jan 2002Dynamic Calibration of a Shear-Stress Sensor Using Stokes-Layer Excitation Mark Sheplak , Aravind Padmanabhan , Martin A. Schmidt and Kenneth S. Breuer 17 May 2012 | AIAA Journal, Vol. 39, No. 5A contact-type piezoresistive micro-shear stress sensor for above-knee prosthesis application1 Mar 2001 | Journal of Microelectromechanical Systems, Vol. 10, No. 1Characterization of a micromachined thermal shear stress sensorVenkataraman Chandrasekaran, Anthony Cain, Toshikazu Nishida, Louis Cattafesta and Mark Sheplak22 August 2012Modern skin friction measurement techniques - Description, use, and what to do with the dataJonathan Naughton and Mark Sheplak22 August 2012Microfabricated Shear Stress Sensors, Part 2: Testing and Calibration Dan Hyman , Tao Pan , Eli Reshotko and Mehran Mehregany 17 May 2012 | AIAA Journal, Vol. 37, No. 1 What's Popular Volume 37, Number 1January 1999 Metrics Crossmark TopicsAerodynamicsAeronauticsAerospace SciencesAvionicsDiodesIntegrated CircuitsSemiconductor DevicesSemiconductor DiodesSensorsTransducersTransistorsWind Tunnels KeywordsResidual StressSensorsAccelerometerCapacitanceMicroelectromechanical SystemsReactive Ion EtchingIntegrated CircuitsBeam (Structures)TransistorsSurface MicromachiningDigital Published online17 May 2012